JPS6220160B2 - - Google Patents

Info

Publication number
JPS6220160B2
JPS6220160B2 JP54153422A JP15342279A JPS6220160B2 JP S6220160 B2 JPS6220160 B2 JP S6220160B2 JP 54153422 A JP54153422 A JP 54153422A JP 15342279 A JP15342279 A JP 15342279A JP S6220160 B2 JPS6220160 B2 JP S6220160B2
Authority
JP
Japan
Prior art keywords
gas
reaction
gas inlet
vapor phase
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54153422A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5678497A (en
Inventor
Akihiro Shibatomi
Kenya Nakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15342279A priority Critical patent/JPS5678497A/ja
Publication of JPS5678497A publication Critical patent/JPS5678497A/ja
Publication of JPS6220160B2 publication Critical patent/JPS6220160B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45572—Cooled nozzles

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP15342279A 1979-11-27 1979-11-27 Vapor growth apparatus Granted JPS5678497A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15342279A JPS5678497A (en) 1979-11-27 1979-11-27 Vapor growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15342279A JPS5678497A (en) 1979-11-27 1979-11-27 Vapor growth apparatus

Publications (2)

Publication Number Publication Date
JPS5678497A JPS5678497A (en) 1981-06-27
JPS6220160B2 true JPS6220160B2 (en]) 1987-05-06

Family

ID=15562151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15342279A Granted JPS5678497A (en) 1979-11-27 1979-11-27 Vapor growth apparatus

Country Status (1)

Country Link
JP (1) JPS5678497A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016898A (ja) * 1983-07-08 1985-01-28 Matsushita Electric Ind Co Ltd 気相成長装置
JPS615515A (ja) * 1984-06-07 1986-01-11 Fujitsu Ltd 化学気相成長装置
JPH0530351Y2 (en]) * 1985-03-26 1993-08-03
JPS62152123A (ja) * 1985-12-26 1987-07-07 Matsushita Electric Ind Co Ltd 気相成長装置
JPH02222134A (ja) * 1989-02-23 1990-09-04 Nobuo Mikoshiba 薄膜形成装置
JPH02142525U (en]) * 1990-05-10 1990-12-04
JP3057330B2 (ja) * 1991-09-27 2000-06-26 コマツ電子金属株式会社 ガス導入装置、エピタキシャル成長装置およびエピタキシャル成長方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638981Y2 (en]) * 1977-08-17 1981-09-11

Also Published As

Publication number Publication date
JPS5678497A (en) 1981-06-27

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